http://qz-heating-ir.com/zh/tags/%E5%A4%87%E7%94%A8%E5%A4%9A%E4%BD%99%E7%9A%84/ Recent content in 备用；多余的 on Quartz IR Heating Experts Hugo zh Tue, 02 Jun 2026 06:03:02 +0800 http://qz-heating-ir.com/zh/posts/semiconductor-machinery-spare-parts-heater/ Tue, 02 Jun 2026 06:03:02 +0800 http://qz-heating-ir.com/zh/posts/semiconductor-machinery-spare-parts-heater/ <p><img src="http://qz-heating-ir.com/images/016cf4f616aaa15e4af48856b8adc51b.png" alt="半导体机械备件加热器"></p> <p>在晶圆厂车间，光刻胶烘烤步骤没有任何漂移余地。90°C的软烘烤温度如果漂移±2°C，会导致光刻胶轮廓膨胀，从而影响线宽控制。所需的是一种能像固定常数一样保持晶圆温度的加热器，而非变量型。</p>